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Automated Valve Manifold Box with Leak Detection for Toxic and Flammable Semiconductor Process Gases
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Automated Valve Manifold Box with Leak Detection for Toxic and Flammable Semiconductor Process Gases

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Automated Valve Manifold Box with Leak Detection for Toxic and Flammable Semiconductor Process Gases

The Automated Valve Manifold Box (VMB) is an essential safety and distribution hub designed specifically for the high-stakes environment of semiconductor fabrication. When handling toxic, pyrophoric, or flammable gases such as Silane or Phosphine, compromise is not an option. This system provides a secure, negative-pressure enclosure that prevents hazardous leaks from reaching the cleanroom floor.

At the heart of the unit is an advanced PLC-controlled automation system, typically featuring Siemens or Allen-Bradley logic. This allows for real-time monitoring of gas flow, pressure levels, and enclosure integrity via a user-friendly touchscreen interface. The most critical feature is the integrated leak detection system, which constantly samples the internal atmosphere. In the event of a detected leak or exhaust failure, the system triggers an immediate Emergency Shut-Off (ESO), isolating the gas source and protecting both personnel and expensive process tools.

Constructed from electropolished 316L stainless steel, the internal gas sticks maintain ultra-high purity (UHP) standards to ensure zero contamination of the wafer. By combining automated purging sequences, precise pressure regulation, and robust safety protocols, the Automated VMB provides the reliability and peace of mind required for modern, high-volume semiconductor manufacturing.

Technical Data

Model JW-500-VMB
Specification 4S/6S/8S
Special gas cabinet size W870*D340*H1680
Control cabinet power supply Control power supply: 220VAC, 50HZ, 500W, heating power supply: 220VAC, 50HZ, 1-6KW
Purge PN2,1/4”MVCJ
Vacuum GN2.1/4” MVCJ
VENT drain pipe 1/2” MVCJ
Pneumatic air source CDA driver, 1/4″ SWG
Cabinet ventilation OD 100MM,70m3/hr
Standard equipment Explosion-proof and anti-separation cabinet, explosion-proof self-locking door, explosion-proof glass observation window, remote cut-off
Operation interface 7″ color touch screen

Optional

*UV/IR
*Panel heating
*Ethernet communication module
*High temperature switch
*Smoke sensor

Shenzhen Jewellok Technology Co., Ltd. is a premier high-tech manufacturer specializing in the design and production of Ultra-High Purity (UHP) gas and chemical delivery systems. Based in the global innovation hub of Shenzhen, China, the company provides mission-critical fluid control solutions for industries where precision, safety, and absolute purity are non-negotiable.
Our core expertise lies in developing end-to-end infrastructure for semiconductor fabrication, photovoltaic (solar) manufacturing, EV battery production, and high-end laboratories. Jewellok’s product portfolio includes advanced Valve Manifold Boxes (VMB), Valve Manifold Panels (VMP), fully automatic gas cabinets (GC), and high-purity pressure regulators. Each system is engineered to handle specialty gases—including toxic, corrosive, and flammable materials—with zero contamination and maximum operational safety.

At the heart of our manufacturing process is a commitment to material excellence. We utilize electropolished 316L stainless steel to ensure internal surface finishes reach Ra ≤ 5 μin, effectively eliminating particle entrapment. Our systems feature helium leak rates as low as 1 × 10⁻⁹ atm·cc/sec, providing the airtight reliability required for sub-micron semiconductor processing.

Jewellok distinguishes itself through technical innovation and modular design. Our systems are equipped with Siemens or Allen-Bradley PLC controllers, offering 24/7 monitoring, automated emergency shut-off (ESO) protocols, and seamless integration into factory-wide management software. This allows our global clients to scale their production capacity efficiently while maintaining the highest safety standards.

Guided by the principles of “Quality First and Technological Innovation,” Shenzhen Jewellok Technology continues to push the boundaries of fluid dynamics. Whether providing components for a research lab or a large-scale wafer fab, we deliver the precision and reliability needed to power the next generation of global technology.

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