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Fully Automated Gas Cabinet for Safe Ultra High Purity Specialty Gas Delivery in Semiconductor Manufacturing

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Fully Automated Gas Cabinet for Safe Ultra High Purity Specialty Gas Delivery in Semiconductor Manufacturing

The Fully Automated Gas Cabinet is the gold standard for managing hazardous specialty gases in semiconductor manufacturing. Designed to handle toxic, flammable, and corrosive materials, this system ensures that ultra-high purity (UHP) gases reach process tools without contamination or risk to personnel. The cabinet operates under constant negative pressure, ensuring that any internal leaks are immediately captured and exhausted away from the cleanroom.

What sets this system apart is its integrated PLC automation. The controller manages complex sequences, such as automatic nitrogen purging and vacuum cycles, which are essential for safely changing gas cylinders. By automating these steps, the system eliminates human error and prevents atmospheric contamination of the gas lines. Additionally, an automatic switchover feature detects when a cylinder is low and seamlessly transitions to a reserve supply, guaranteeing 24/7 uninterrupted production.

Safety is further enhanced by high-sensitivity sensors that monitor for leaks, fire, and exhaust failure. In any alarm condition, the Emergency Shut-Off (ESO) valves instantly isolate the gas source. Built with electropolished 316L stainless steel, the Fully Automated Gas Cabinet provides the ultimate combination of chemical compatibility, structural safety, and precision flow control for modern wafer fabrication

 

Technical Data

Model JW-100-GC with semiconductor valve manifold box gas pressure regulators
Specification Single bottle/double bottle
Special gas cabinet size Double bottle: W800*D520*H1957, single bottle: W500*D520*H1957
Control cabinet power supply Control power supply: 220VAC, 50HZ, 500W, heating power supply: 220VAC, 50HZ, 1-6KW
Standard equipment Anti-corrosion frame, stainless steel base

Shenzhen Jewellok Technology Co., Ltd. is a leading high-tech enterprise dedicated to the design, manufacture, and global distribution of Ultra-High Purity (UHP) gas and chemical delivery systems. Headquartered in the technological hub of Shenzhen, China, we provide mission-critical fluid control infrastructure for the most demanding manufacturing environments, including semiconductor fabrication, photovoltaic energy, EV battery production, and aerospace research.
Our core expertise lies in creating contamination-free environments for the handling of hazardous, toxic, and flammable specialty gases. Jewellok’s comprehensive product portfolio features Fully Automated Gas Cabinets (GC), Valve Manifold Boxes (VMB), and Valve Manifold Panels (VMP). Each system is engineered to meet the stringent standards of sub-micron fabrication, ensuring that process gases like Silane, Ammonia, and Hydrogen Chloride are delivered with absolute precision and zero purity loss.
Technical excellence is the foundation of our manufacturing process. We utilize high-grade, electropolished 316L stainless steel for all gas-contacting components, achieving internal surface finishes of Ra ≤ 5 μin. This eliminates particle entrapment and outgassing, which are vital for maintaining wafer yields. Our systems undergo rigorous helium leak testing to reach rates as low as ≤ 1 × 10⁻⁹ atm·cc/sec, providing industry-leading airtight reliability.
Beyond hardware, Jewellok integrates advanced PLC-based automation using Siemens and Allen-Bradley logic. Our systems offer 24/7 remote monitoring, automated nitrogen purging, and seamless Automatic Gas Switchover capabilities to ensure uninterrupted production cycles. Safety is paramount; every automated unit is equipped with multi-point leak detection, UV/IR flame sensors, and Emergency Shut-Off (ESO) protocols to protect personnel and high-value assets.
By combining innovative fluid dynamics with a “Quality First” philosophy, Shenzhen Jewellok Technology provides the scalable, safe, and ultra-pure infrastructure necessary to power the next generation of global high-tech industries.

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