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Semi Automatic Gas Cabinet Systems for Handling Toxic and Flammable Process Specialty Gases in High Tech

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Semi Automatic Gas Cabinet Systems for Handling Toxic and Flammable Process Specialty Gases in High Tech

The Semi Automatic Gas Cabinet System is a robust and cost-effective safety solution designed for the controlled distribution of toxic, flammable, and corrosive specialty gases. Tailored for high-tech environments like semiconductor labs and pilot production lines, this system bridges the gap between manual operation and full automation, providing essential safety interlocks without the complexity of a fully automated PLC suite.

At its core, the semi-automatic cabinet features a pneumatic emergency shut-off (ESO) valve that can be triggered by external gas detectors, fire alarms, or manual panic buttons. This ensures that in the event of a leak or exhaust failure, the hazardous gas source is instantly isolated. While cylinder changeover and purging sequences are typically initiated by a technician, the system uses integrated pressure switches and flow monitors to guide the process and prevent backflow or cross-contamination.

Constructed from electropolished 316L stainless steel, the internal manifold maintains ultra-high purity (UHP) standards with a surface finish of Ra ≤ 5 μin. The cabinet is kept under constant negative pressure to safely vent any trace leaks. By combining high-grade materials with critical safety triggers, the Semi Automatic Gas Cabinet offers a reliable, high-purity delivery platform for sensitive chemical processes.

 

Technical Data

Model JW-100-GC with semiconductor valve manifold box gas pressure regulators
Specification Single bottle/double bottle
Special gas cabinet size Double bottle: W800*D520*H1957, single bottle: W500*D520*H1957
Control cabinet power supply Control power supply: 220VAC, 50HZ, 500W, heating power supply: 220VAC, 50HZ, 1-6KW
Standard equipment Anti-corrosion frame, stainless steel base

Shenzhen Jewellok Technology Co., Ltd. is a leading high-tech enterprise dedicated to the design, manufacture, and global distribution of Ultra-High Purity (UHP) gas and chemical delivery systems. Headquartered in the technological hub of Shenzhen, China, we provide mission-critical fluid control infrastructure for the most demanding manufacturing environments, including semiconductor fabrication, photovoltaic energy, EV battery production, and aerospace research.
Our core expertise lies in creating contamination-free environments for the handling of hazardous, toxic, and flammable specialty gases. Jewellok’s comprehensive product portfolio features Fully Automated Gas Cabinets (GC), Valve Manifold Boxes (VMB), and Valve Manifold Panels (VMP). Each system is engineered to meet the stringent standards of sub-micron fabrication, ensuring that process gases like Silane, Ammonia, and Hydrogen Chloride are delivered with absolute precision and zero purity loss.
Technical excellence is the foundation of our manufacturing process. We utilize high-grade, electropolished 316L stainless steel for all gas-contacting components, achieving internal surface finishes of Ra ≤ 5 μin. This eliminates particle entrapment and outgassing, which are vital for maintaining wafer yields. Our systems undergo rigorous helium leak testing to reach rates as low as ≤ 1 × 10⁻⁹ atm·cc/sec, providing industry-leading airtight reliability.
Beyond hardware, Jewellok integrates advanced PLC-based automation using Siemens and Allen-Bradley logic. Our systems offer 24/7 remote monitoring, automated nitrogen purging, and seamless Automatic Gas Switchover capabilities to ensure uninterrupted production cycles. Safety is paramount; every automated unit is equipped with multi-point leak detection, UV/IR flame sensors, and Emergency Shut-Off (ESO) protocols to protect personnel and high-value assets.
By combining innovative fluid dynamics with a “Quality First” philosophy, Shenzhen Jewellok Technology provides the scalable, safe, and ultra-pure infrastructure necessary to power the next generation of global high-tech industries.

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