VMB Valve Manifold Panels And Boxes
chemical delivery module (cdm) and chemical delivery system (cds)
chemical delivery module (cdm) and chemical delivery system (cds)
chemical delivery module (cdm) and chemical delivery system (cds)
exhaust gas scrubber system work for semiconductor manufacturing
chemical delivery module (cdm) and chemical delivery system (cds)
chemical delivery module (cdm) and chemical delivery system (cds)
  1. VMB Valve Manifold Panels And Boxes
  2. chemical delivery module (cdm) and chemical delivery system (cds)
  3. chemical delivery module (cdm) and chemical delivery system (cds)
  4. chemical delivery module (cdm) and chemical delivery system (cds)
  5. exhaust gas scrubber system work for semiconductor manufacturing
  6. chemical delivery module (cdm) and chemical delivery system (cds)
  7. chemical delivery module (cdm) and chemical delivery system (cds)

High Purity Bulk Gas Delivery Systems for Semiconductor Manufacturing and Advanced Chemical Distribution Infrastructure

Category: Tags: , , ,

High Purity Bulk Gas Delivery Systems for Semiconductor Manufacturing and Advanced Chemical Distribution Infrastructure

High Purity Bulk Gas Delivery Systems serve as the backbone for modern semiconductor manufacturing and advanced chemical distribution. Unlike standard gas cabinets designed for single cylinders, bulk systems are engineered to manage massive volumes of specialty gases from sources like tube trailers or cryogenic tanks. This scale is essential for high-volume wafer fabrication, where an uninterrupted, high-flow supply of process gases is required 24/7.

To ensure the integrity of the manufacturing process, these systems are constructed using electropolished 316L stainless steel. This material choice, combined with orbital welding, minimizes particle generation and outgassing, maintaining purity levels at 99.999% or higher. The infrastructure includes sophisticated Bulk Specialty Gas Systems (BSGS) that integrate automatic switchover capabilities, ensuring that when one bulk source is depleted, the system transitions to a backup without any drop in line pressure.

Safety is paramount in bulk distribution. These systems feature multi-stage leak detection, automated Emergency Shut-Off (ESO) valves, and integrated scrubbers to treat hazardous exhaust. By centralizing gas management, facilities reduce the risks associated with frequent cylinder handling while achieving significant operational cost savings. The result is a highly reliable, ultra-pure delivery network that supports the complex requirements of sub-micron semiconductor production.

 

Technical Data

Model JW-400-BSGS
Specification W800*D633*H2172
Special gas cabinet size Control power supply: 220VAC, 50HZ, 500W, heating power supply: 220VAC, 50HZ, 1-6KW
Control cabinet power supply PN2,1/4”MVCJ
Purge HPN2,1/4”MVCJ
High pressure holding GN2.1/4” MVCJ
Vacuum 1/2” MVCJ
VENT drain pipe CDA driver, 1/4″ SWG
Pneumatic air source OD 150MM, silane 810m/hr; others 204m3/hr
Cabinet ventilation Automatic switching, automatic purging, explosion-proof and anti-leaving cabinet, explosion-proof self-locking door, explosion-proof glass observation window, leakage alarm, remote cut-off, negative pressure alarm
Operation interface 10″ color touch screen

Optional
*UV/IR Flame Detector
*Cylinder Shutboy
*Panel heating
*Ethernet communication module
*Weight Scale
*Excess Flow Switch

Shenzhen Jewellok Technology Co., Ltd. is a premier high-tech manufacturer specializing in the engineering and production of Ultra-High Purity (UHP) gas and chemical delivery systems. Strategically located in Shenzhen, China, we provide mission-critical infrastructure to the world’s most demanding industries, including semiconductor fabrication, photovoltaic energy, EV battery manufacturing, and aerospace research.
Our core mission is to provide safe, contamination-free fluid management solutions for hazardous, toxic, and flammable specialty gases. Jewellok’s extensive product line includes Fully Automated Gas Cabinets (GC), Valve Manifold Boxes (VMB), and large-scale Bulk Specialty Gas Systems (BSGS). Each system is designed to meet the rigorous standards of sub-micron manufacturing, ensuring that gases like Silane, Ammonia, and Hydrogen Chloride reach process tools with absolute purity and zero pressure fluctuations.
Technological integrity is the foundation of our manufacturing philosophy. We utilize high-grade, electropolished 316L stainless steel for all gas-contacting components, achieving internal surface finishes of Ra ≤ 5 μin. This prevents particle entrapment and outgassing, which are critical for maximizing wafer yields. Our equipment undergoes stringent helium leak testing to ensure rates as low as ≤ 1 × 10⁻⁹ atm·cc/sec, offering industry-leading airtight reliability.
Beyond precision hardware, Jewellok integrates advanced PLC-based automation using Siemens and Allen-Bradley systems. Our solutions offer 24/7 remote monitoring, automated nitrogen purging, and Automatic Gas Switchover capabilities to guarantee uninterrupted production cycles. Safety is our highest priority; every automated unit features multi-point leak detection, UV/IR flame sensors, and Emergency Shut-Off (ESO) protocols to protect both personnel and high-value facility assets.
By merging innovative fluid dynamics with a “Quality First” commitment, Shenzhen Jewellok Technology delivers the scalable and ultra-pure infrastructure necessary to power the future of global high-tech industries.

Related products