High Purity VMB Valve Manifold Box for Semiconductor Gas Distribution and Specialty Chemical Delivery Systems

High Purity VMB Valve Manifold Box for Semiconductor Gas Distribution and Specialty Chemical Delivery Systems

The High Purity VMB Valve Manifold Box is a critical infrastructure component designed for the rigorous demands of semiconductor gas distribution and specialty chemical delivery. Engineered to maintain absolute purity, these systems act as a centralized hub to branch a single high-pressure gas source into multiple, independently controlled process lines.

The core of the Jewellok VMB is constructed from electropolished 316L stainless steel, ensuring that internal surfaces remain free of particles and contaminants. This is essential for wafer fabrication, where even microscopic impurities can ruin production. For safety, the VMB features a fully enclosed, exhausted cabinet equipped with leak detection sensors and emergency shut-off valves, making it the industry standard for handling hazardous, toxic, or flammable gases like Silane.

Beyond safety, the system offers high-precision control through integrated gas sticks that include regulators and diaphragm valves. These components ensure a stable flow with minimal pressure fluctuations. Whether configured for manual or fully automated PLC operation, the VMB allows technicians to perform maintenance on individual lines without interrupting the entire facility’s gas supply. By combining safety, purity, and modularity, the High Purity VMB provides a reliable solution for modern high-tech manufacturing environments.

 

Technical Data

Model	JW-200-VMB, JW-100-VMB
Specification	4S/6S/8S
Special gas cabinet size	W870*D340*H1680
Control cabinet power supply	Control power supply: 220VAC, 50HZ, 500W, heating power supply: 220VAC, 50HZ, 1-6KW
Purge	PN2,1/4”MVCJ
Vacuum	GN2.1/4” MVCJ
VENT drain pipe	1/2” MVCJ
Pneumatic air source	CDA driver, 1/4″ SWG
Cabinet ventilation	OD 100MM,70m3/hr
Standard equipment	Explosion-proof and anti-separation cabinet, explosion-proof self-locking door, explosion-proof glass observation window, remote cut-off
Operation interface	7″ color touch screen

Optional

*UV/IR
*Panel heating
*Ethernet communication module
*High temperature switch
*Smoke sensor

Shenzhen Jewellok Technology Co., Ltd. is a premier high-tech manufacturer specializing in the design and production of Ultra-High Purity (UHP) gas and chemical delivery systems. Based in the global innovation hub of Shenzhen, China, the company provides mission-critical fluid control solutions for industries where precision, safety, and absolute purity are non-negotiable.
Our core expertise lies in developing end-to-end infrastructure for semiconductor fabrication, photovoltaic (solar) manufacturing, EV battery production, and high-end laboratories. Jewellok’s product portfolio includes advanced Valve Manifold Boxes (VMB), Valve Manifold Panels (VMP), fully automatic gas cabinets (GC), and high-purity pressure regulators. Each system is engineered to handle specialty gases—including toxic, corrosive, and flammable materials—with zero contamination and maximum operational safety.

At the heart of our manufacturing process is a commitment to material excellence. We utilize electropolished 316L stainless steel to ensure internal surface finishes reach Ra ≤ 5 μin, effectively eliminating particle entrapment. Our systems feature helium leak rates as low as 1 × 10⁻⁹ atm·cc/sec, providing the airtight reliability required for sub-micron semiconductor processing.

Jewellok distinguishes itself through technical innovation and modular design. Our systems are equipped with Siemens or Allen-Bradley PLC controllers, offering 24/7 monitoring, automated emergency shut-off (ESO) protocols, and seamless integration into factory-wide management software. This allows our global clients to scale their production capacity efficiently while maintaining the highest safety standards.

Guided by the principles of “Quality First and Technological Innovation,” Shenzhen Jewellok Technology continues to push the boundaries of fluid dynamics. Whether providing components for a research lab or a large-scale wafer fab, we deliver the precision and reliability needed to power the next generation of global technology.