








UHP Liquid Chemical Delivery Systems with Nitrogen Blanketing and Secondary Containment for Hazardous Industrial Chemical Processing
UHP Liquid Chemical Delivery Systems with Nitrogen Blanketing and Secondary Containment for Hazardous Industrial Chemical Processing
UHP Liquid Chemical Delivery Systems with Nitrogen Blanketing and Secondary Containment represent the gold standard for safety and purity in hazardous industrial chemical processing. When handling volatile or corrosive chemicals in semiconductor and photovoltaic fabrication, the risks to both personnel and product yield are significant. These systems are specifically engineered to mitigate those risks while maintaining parts-per-trillion (ppt) purity levels.
A critical feature of these systems is nitrogen blanketing. By displacing oxygen with an inert nitrogen layer, the system prevents chemical oxidation and eliminates the risk of combustion for flammable liquids. Complementing this is secondary containment, which provides a “box-within-a-box” physical barrier. In the event of a primary line failure, the outer cabinet or jacketed piping captures the leak, preventing hazardous exposure within the cleanroom.
Constructed from 316L electropolished stainless steel with a 5Ra surface finish, the hardware is as durable as it is clean. Integration with PLC automation allows for real-time monitoring via non-contact sensors and automated leak detection. These safety layers ensure that even the most aggressive chemicals are delivered reliably, protecting the facility’s high-value infrastructure and ensuring continuous, accident-free production cycles.
Technical Data
| Model | JW-300-LDS |
| Special gas cabinet size | W1900*D800*H2100 |
| Control cabinet power supply | Control power supply: 220VAC, 50HZ, 500W, heating power supply: 220VAC, 50HZ, 1-6KW |
| Purge | PN2,1/4”MVCJ |
| High pressure holding | GN2.1/4” MVCJ |
| Vacuum | 1/2” MVCJ |
| VENT drain pipe | CDA driver, 1/4″ SWG |
| Pneumatic air source | OD 150MM, silane 810m³/hr; others 204m³/hr |
| Cabinet ventilation | OD 150MM, silane 810m³/hr; others 204m³/hr |
| Standard equipment | Automatic switching, automatic purging, explosion-proof and anti-leaving cabinet, explosion-proof self-locking door, explosion-proof glass observation window, leakage alarm, remote cut-off, negative pressure alarm |
| Operation interface | 10″ color touch screen |
Optional
*UV/IR Flame Detector
*Cylinder heating
*Panel heating
*Ethernet communication module
*Weight Scale
*Excess Flow Switch
*Smoke Sensor Switch
Application:
Semiconductor
Photovoltaic
Solar energy
Liquid crystal panel
Optical fiber
Other production fields
Speciality Chemicals Handled
HF- Hydrofluoric acid
HCL- Hydrochloric acid
H2O2- Hydrogen Peroxide
KOH- Potassium Hydroxide
HNO3- Nitric acid
NH4OH- Ammonium Hydroxide
H2SO4- Sulfuric acid
Function:
Liquid chemical filtration
Liquid chemical sampling
Liquid chemical circulation
Liquid chemical delivering











