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chemical delivery module (cdm) and chemical delivery system (cds)
chemical delivery module (cdm) and chemical delivery system (cds)
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chemical delivery module (cdm) and chemical delivery system (cds)
chemical delivery module (cdm) and chemical delivery system (cds)
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  3. chemical delivery module (cdm) and chemical delivery system (cds)
  4. chemical delivery module (cdm) and chemical delivery system (cds)
  5. exhaust gas scrubber system work for semiconductor manufacturing
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Advanced Bulk Specialty Gas Systems BSGS Gas Cabinet for Safe Handling of Toxic and Flammable Process Gases

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Advanced Bulk Specialty Gas Systems BSGS Gas Cabinet for Safe Handling of Toxic and Flammable Process Gases

The Advanced Bulk Specialty Gas System (BSGS) is a high-capacity gas cabinet designed to provide a secure and continuous flow of hazardous materials. In high-tech manufacturing, where processes require massive volumes of toxic, flammable, or pyrophoric gases like Silane or Ammonia, standard gas cabinets are often insufficient. The BSGS fills this gap by connecting large-scale sources, such as Y-cylinders or tube trailers, directly to the facility’s distribution network.

Safety is the primary driver of the BSGS design. The system features a robust, negative-pressure enclosure that prevents hazardous leaks from escaping into the workspace. Integrated with advanced PLC automation, the cabinet performs self-purging sequences and constant leak monitoring. If a sensor detects an abnormality, the Emergency Shut-Off (ESO) valves instantly isolate the bulk source.

To maintain Ultra-High Purity (UHP) standards, all internal plumbing is crafted from electropolished 316L stainless steel. This ensures that the gas remains free of metallic contaminants and moisture, which is vital for maintaining high yields in semiconductor and LED fabrication. By combining automated switchover capabilities with rigorous containment protocols, the Jewellok BSGS ensures that high-volume gas delivery is both efficient and fail-safe.

 

Technical Data

Model JW-400-BSGS
Specification W800*D633*H2172
Special gas cabinet size Control power supply: 220VAC, 50HZ, 500W, heating power supply: 220VAC, 50HZ, 1-6KW
Control cabinet power supply PN2,1/4”MVCJ
Purge HPN2,1/4”MVCJ
High pressure holding GN2.1/4” MVCJ
Vacuum 1/2” MVCJ
VENT drain pipe CDA driver, 1/4″ SWG
Pneumatic air source OD 150MM, silane 810m/hr; others 204m3/hr
Cabinet ventilation Automatic switching, automatic purging, explosion-proof and anti-leaving cabinet, explosion-proof self-locking door, explosion-proof glass observation window, leakage alarm, remote cut-off, negative pressure alarm
Operation interface 10″ color touch screen

Optional
*UV/IR Flame Detector
*Cylinder Shutboy
*Panel heating
*Ethernet communication module
*Weight Scale
*Excess Flow Switch

Shenzhen Jewellok Technology Co., Ltd. is a premier high-tech manufacturer specializing in the engineering and production of Ultra-High Purity (UHP) gas and chemical delivery systems. Strategically located in Shenzhen, China, we provide mission-critical infrastructure to the world’s most demanding industries, including semiconductor fabrication, photovoltaic energy, EV battery manufacturing, and aerospace research.
Our core mission is to provide safe, contamination-free fluid management solutions for hazardous, toxic, and flammable specialty gases. Jewellok’s extensive product line includes Fully Automated Gas Cabinets (GC), Valve Manifold Boxes (VMB), and large-scale Bulk Specialty Gas Systems (BSGS). Each system is designed to meet the rigorous standards of sub-micron manufacturing, ensuring that gases like Silane, Ammonia, and Hydrogen Chloride reach process tools with absolute purity and zero pressure fluctuations.
Technological integrity is the foundation of our manufacturing philosophy. We utilize high-grade, electropolished 316L stainless steel for all gas-contacting components, achieving internal surface finishes of Ra ≤ 5 μin. This prevents particle entrapment and outgassing, which are critical for maximizing wafer yields. Our equipment undergoes stringent helium leak testing to ensure rates as low as ≤ 1 × 10⁻⁹ atm·cc/sec, offering industry-leading airtight reliability.
Beyond precision hardware, Jewellok integrates advanced PLC-based automation using Siemens and Allen-Bradley systems. Our solutions offer 24/7 remote monitoring, automated nitrogen purging, and Automatic Gas Switchover capabilities to guarantee uninterrupted production cycles. Safety is our highest priority; every automated unit features multi-point leak detection, UV/IR flame sensors, and Emergency Shut-Off (ESO) protocols to protect both personnel and high-value facility assets.
By merging innovative fluid dynamics with a “Quality First” commitment, Shenzhen Jewellok Technology delivers the scalable and ultra-pure infrastructure necessary to power the future of global high-tech industries.

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