UHP Liquid Chemical Delivery Systems for Semiconductor Fabrication and Photovoltaic Manufacturing Processes
UHP Liquid Chemical Delivery Systems for Semiconductor Fabrication and Photovoltaic Manufacturing Processes
UHP (Ultra-High Purity) Liquid Chemical Delivery Systems are critical infrastructure for modern semiconductor and photovoltaic manufacturing. These systems ensure that hazardous and sensitive chemicals reach production tools without any loss in purity. In industries where even a microscopic particle can ruin a silicon wafer, maintaining ppt-level (parts-per-trillion) purity is the standard.
The core of the system relies on 316L electropolished stainless steel and high-grade fluoropolymers. These materials, often finished to a 5Ra surface smoothness, prevent corrosion and particle shedding. The delivery process is managed by Chemical Delivery Systems (CDS) for bulk transport and Chemical Delivery Modules (CDM) for precise, point-of-use blending and dilution.
To maximize efficiency, these systems utilize PLC automation and non-contact sensors, allowing for real-time monitoring of flow rates and pressure. For maintenance and safety, Valve Manifold Boxes (VMB) provide essential tool isolation, allowing one part of the factory to stay online while another is serviced. Safety is further reinforced through nitrogen blanketing, secondary containment, and automated leak detection, protecting both the high-value product and the facility personnel. These integrated solutions are vital for achieving the high yields required in sub-micron fabrication.
Technical Data
| Model | JW-200L-CDM,JW-1000L-CDM |
| Special gas cabinet size | W2200*D1500*H2000(double drums)/W2990*D2100*H2000(double drums) |
| Control cabinet power supply | 220VAC, 50HZ, 0.5～3KW, leakage protection |
| Purge | PN2,SS316 1/2″SWG |
| Ultra-pure water | UPW, JIS 16A bonding |
| Compressed air | CDA,SS316 1/2″SWG |
| Waste outlet | Drain,PP DN20 Fusion Socket/Drain,PP DN25 Fusion Socket |
| Standard equipment | PP shell + transparent PVC observation window + PFA internal pipe valve, nitrogen purging, sampling, fully automatic acid supply, automatic switching of left and right barrels. The pump body has two uses and one backup. It can automatically switch the liquid supply operation according to the liquid level in the barrel. The touch screen can display the working status of each valve and the liquid supply status of the pipeline. Automatically cut off the fluid supply, early warning and alarm of the operating status of each part of the system, self-check and confirmation of multiple safety, simple system, and supports multiple languages, supports multiple signal inputs, code scanner, high-efficiency filter, door sensor Optional |
*Emergency manual operation panel
*High efficiency filter
*Door sensor
Application:
Semiconductor
Photovoltaic
Solar energy
Liquid crystal panel
Optical fiber
Other production fields
Speciality Chemicals Handled
HF- Hydrofluoric acid
HCL- Hydrochloric acid
H2O2- Hydrogen Peroxide
KOH- Potassium Hydroxide
HNO3- Nitric acid
NH4OH- Ammonium Hydroxide
H2SO4- Sulfuric acid
Function:
Liquid chemical filtration
Liquid chemical sampling
Liquid chemical circulation
Liquid chemical delivering
Shenzhen Jewellok Technology is a premier provider of Ultra-High Purity (UHP) Liquid Chemical Delivery Systems, specializing in mission-critical infrastructure for the semiconductor and photovoltaic industries. As global manufacturing pushes toward sub-micron precision, we provide the engineering excellence required to maintain chemical integrity at the parts-per-trillion (ppt) level.
Our core mission is to facilitate seamless, contamination-free chemical transport from bulk storage to the point of use. We offer a comprehensive suite of solutions, including Chemical Delivery Systems (CDS) for high-volume transport and Chemical Delivery Modules (CDM) designed for automated, high-precision blending and dilution. These systems are essential for sensitive processes such as Chemical Mechanical Planarization (CMP) and wet etching, where consistency is the key to high production yields.
Quality is built into every component. Our hardware is constructed from 316L electropolished stainless steel with a 5Ra surface finish, significantly reducing the risk of particle shedding or chemical reaction. To enhance facility uptime, our Valve Manifold Boxes (VMB) allow for discrete tool isolation, enabling maintenance without requiring a total system shutdown.
Innovation drives our design philosophy. By integrating PLC automation and non-contact sensors, we provide operators with real-time monitoring and data-driven control over their chemical distribution networks. Furthermore, safety remains our highest priority. Every Jewellok system incorporates multi-layered protection, including nitrogen blanketing, secondary containment, and advanced automated leak detection to protect both personnel and the environment.
At Jewellok, we don’t just provide equipment; we deliver the reliability and purity essential for the next generation of microelectronics. Whether you are scaling a new fabrication plant or upgrading an existing line, our UHP solutions ensure your chemicals remain as pure at the tool as they were at the source.
Related products
-
Chemical Delivery Modules for Automated Blending and Precise Dilution in Modern Wafer Cleaning Applications
-
High Purity Bulk Chemical Delivery System and Automatic CDU for Advanced Semiconductor Manufacturing and Fabrication
-
UHP Liquid Chemical Delivery Systems with Nitrogen Blanketing and Secondary Containment for Hazardous Industrial Chemical Processing
-
High Purity Liquid Chemical Delivery Systems Designed for Sub Micron Semiconductor Production