UHP Liquid Chemical Delivery Systems with Nitrogen Blanketing and Secondary Containment for Hazardous Industrial Chemical Processing

UHP Liquid Chemical Delivery Systems with Nitrogen Blanketing and Secondary Containment for Hazardous Industrial Chemical Processing

UHP Liquid Chemical Delivery Systems with Nitrogen Blanketing and Secondary Containment represent the gold standard for safety and purity in hazardous industrial chemical processing. When handling volatile or corrosive chemicals in semiconductor and photovoltaic fabrication, the risks to both personnel and product yield are significant. These systems are specifically engineered to mitigate those risks while maintaining parts-per-trillion (ppt) purity levels.

A critical feature of these systems is nitrogen blanketing. By displacing oxygen with an inert nitrogen layer, the system prevents chemical oxidation and eliminates the risk of combustion for flammable liquids. Complementing this is secondary containment, which provides a “box-within-a-box” physical barrier. In the event of a primary line failure, the outer cabinet or jacketed piping captures the leak, preventing hazardous exposure within the cleanroom.

Constructed from 316L electropolished stainless steel with a 5Ra surface finish, the hardware is as durable as it is clean. Integration with PLC automation allows for real-time monitoring via non-contact sensors and automated leak detection. These safety layers ensure that even the most aggressive chemicals are delivered reliably, protecting the facility’s high-value infrastructure and ensuring continuous, accident-free production cycles.

 

Technical Data

Model JW-300-LDS
Special gas cabinet size W1900*D800*H2100
Control cabinet power supply Control power supply: 220VAC, 50HZ, 500W, heating power supply: 220VAC, 50HZ, 1-6KW
Purge PN2,1/4”MVCJ
High pressure holding GN2.1/4” MVCJ
Vacuum 1/2” MVCJ
VENT drain pipe CDA driver, 1/4″ SWG
Pneumatic air source OD 150MM, silane 810m³/hr; others 204m³/hr
Cabinet ventilation OD 150MM, silane 810m³/hr; others 204m³/hr
Standard equipment Automatic switching, automatic purging, explosion-proof and anti-leaving cabinet, explosion-proof self-locking door, explosion-proof glass observation window, leakage alarm, remote cut-off, negative pressure alarm
Operation interface 10″ color touch screen

Optional
*UV/IR Flame Detector
*Cylinder heating
*Panel heating
*Ethernet communication module
*Weight Scale
*Excess Flow Switch
*Smoke Sensor Switch

Application:
Semiconductor
Photovoltaic
Solar energy
Liquid crystal panel
Optical fiber
Other production fields

Speciality Chemicals Handled
HF- Hydrofluoric acid
HCL- Hydrochloric acid
H2O2- Hydrogen Peroxide
KOH- Potassium Hydroxide
HNO3- Nitric acid
NH4OH- Ammonium Hydroxide
H2SO4- Sulfuric acid

Function:
Liquid chemical filtration
Liquid chemical sampling
Liquid chemical circulation
Liquid chemical delivering

chemical delivery module (cdm) and chemical delivery system (cds)
chemical delivery module (cdm) and chemical delivery system (cds)
chemical delivery module (cdm) and chemical delivery system (cds)
chemical delivery module (cdm) and chemical delivery system (cds)
chemical delivery module (cdm) and chemical delivery system (cds)
chemical delivery module (cdm) and chemical delivery system (cds)

 

Shenzhen Jewellok Technology is a global leader in providing Ultra-High Purity (UHP) Liquid Chemical Delivery Systems for the semiconductor and photovoltaic sectors. We specialize in engineering infrastructure that maintains chemical integrity at the parts-per-trillion (ppt) level, a necessity for the precision required in sub-micron fabrication. Our mission is to bridge the gap between bulk chemical storage and high-tech production tools with zero contamination.
Our product portfolio features Chemical Delivery Systems (CDS) and Chemical Delivery Modules (CDM), which utilize 316L electropolished stainless steel and a 5Ra surface finish to prevent particle shedding. To ensure seamless facility operations, our Valve Manifold Boxes (VMB) offer advanced tool isolation, allowing for targeted maintenance that maximizes overall factory uptime.
Innovation and safety are at the core of our designs. Every system is integrated with PLC automation and non-contact sensors for real-time monitoring and data accuracy. Furthermore, we prioritize site safety by incorporating nitrogen blanketing, secondary containment, and automated leak detection. At Jewellok, we provide the reliable, high-purity foundations that modern electronics manufacturers depend on for high-yield, accident-free production.