High Purity Bulk Chemical Delivery System and Automatic CDU for Advanced Semiconductor Manufacturing and Fabrication

High Purity Bulk Chemical Delivery System and Automatic CDU for Advanced Semiconductor Manufacturing and Fabrication

Modern semiconductor manufacturing requires a “circulatory system” that operates with surgical precision and zero contamination. The integration of a High-Purity Bulk Chemical Delivery System (BCDS) with an Automatic Chemical Dispense Unit (CDU) provides the essential infrastructure for transporting ultrapure acids, solvents, and etchants from bulk storage to the production floor.

The BCDS manages large-volume storage and primary transport using electropolished 316L stainless steel or PFA-lined piping to maintain parts-per-trillion (PPT) purity levels. Once the chemicals reach the “point of use,” the Automatic CDU takes over. It acts as a smart controller, utilizing mass flow meters and servo-driven pumps to dilute, blend, and dispense chemicals with an accuracy of ±1%.

By automating this entire lifecycle, fabs significantly reduce human exposure to hazardous materials and eliminate the risk of particle contamination inherent in manual handling. Integrated safety features—such as nitrogen blanketing, secondary containment, and real-time leak detection—ensure 24/7 operational uptime. For next-generation sub-7nm fabrication, this combined system is not just an utility; it is a critical requirement for maintaining high wafer yields and process consistency.

Technical Data

Model	JW-200L-CDS,JW-1000L-CDM
Special gas cabinet size	W2200D1500H2000(double drums)/W2990D2100H2000(double drums)
Control cabinet power supply	220VAC, 50HZ, 0.5～3KW, leakage protection
Purge	PN2,SS316 1/2″SWG
Ultra-pure water	UPW, JIS 16A bonding
Compressed air	CDA,SS316 1/2″SWG
Waste outlet	Drain,PP DN20 Fusion Socket/Drain,PP DN25 Fusion Socket
Standard equipment	PP shell + transparent PVC observation window + PFA internal pipe valve, nitrogen purging, sampling, fully automatic acid supply, automatic switching of left and right barrels. The pump body has two uses and one backup. It can automatically switch the liquid supply operation according to the liquid level in the barrel. The touch screen can display the working status of each valve and the liquid supply status of the pipeline. Automatically cut off the fluid supply, early warning and alarm of the operating status of each part of the system, self-check and confirmation of multiple safety, simple system, and supports multiple languages, supports multiple signal inputs, code scanner, high-efficiency filter, door sensor Optional

*Emergency manual operation panel
*High efficiency filter
*Door sensor

Application:
Semiconductor
Photovoltaic
Solar energy
Liquid crystal panel
Optical fiber
Other production fields

Speciality Chemicals Handled
HF- Hydrofluoric acid
HCL- Hydrochloric acid
H2O2- Hydrogen Peroxide
KOH- Potassium Hydroxide
HNO3- Nitric acid
NH4OH- Ammonium Hydroxide
H2SO4- Sulfuric acid

Function:
Liquid chemical filtration
Liquid chemical sampling
Liquid chemical circulation
Liquid chemical delivering

chemical delivery module (cdm) and chemical delivery system (cds)

Shenzhen Jewellok Technology is a premier provider of Ultra-High Purity (UHP) Liquid Chemical Delivery Systems, specializing in mission-critical infrastructure for the semiconductor and photovoltaic industries. As global manufacturing pushes toward sub-micron precision, we provide the engineering excellence required to maintain chemical integrity at the parts-per-trillion (ppt) level.

Our core mission is to facilitate seamless, contamination-free chemical transport from bulk storage to the point of use. We offer a comprehensive suite of solutions, including Chemical Delivery Systems (CDS) for high-volume transport and Chemical Delivery Modules (CDM) designed for automated, high-precision blending and dilution. These systems are essential for sensitive processes such as Chemical Mechanical Planarization (CMP) and wet etching, where consistency is the key to high production yields.

Quality is built into every component. Our hardware is constructed from 316L electropolished stainless steel with a 5Ra surface finish, significantly reducing the risk of particle shedding or chemical reaction. To enhance facility uptime, our Valve Manifold Boxes (VMB) allow for discrete tool isolation, enabling maintenance without requiring a total system shutdown.

Innovation drives our design philosophy. By integrating PLC automation and non-contact sensors, we provide operators with real-time monitoring and data-driven control over their chemical distribution networks. Furthermore, safety remains our highest priority. Every Jewellok system incorporates multi-layered protection, including nitrogen blanketing, secondary containment, and advanced automated leak detection to protect both personnel and the environment.

At Jewellok, we don’t just provide equipment; we deliver the reliability and purity essential for the next generation of microelectronics. Whether you are scaling a new fabrication plant or upgrading an existing line, our UHP solutions ensure your chemicals remain as pure at the tool as they were at the source.

Related products

Ultra High Purity Diaphragm Valves and Pressure Regulators for Reliable Ultra High Purity Liquid Chemical Handling Systems

Vertical Laminar Flow Workstation (VLF) With Chemical Concentration Monitor

Integrated Bulk Chemical Delivery System and Automatic CDU Solutions for Safe Hazardous Chemical Fluid Handling

UHP Liquid Chemical Delivery Systems with Nitrogen Blanketing and Secondary Containment for Hazardous Industrial Chemical Processing